DocumentCode :
2698591
Title :
Scanning probe microsystems
Author :
Rangelow, Ivo W.
Author_Institution :
University of Kassel
fYear :
2000
fDate :
2000
Firstpage :
71
Lastpage :
80
Keywords :
Atomic force microscopy; Biomedical measurements; CMOS technology; Chemical sensors; Force sensors; Micromechanical devices; Piezoresistance; Scanning probe microscopy; Structural beams; Surface topography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on
Print_ISBN :
0-7803-5939-9
Type :
conf
DOI :
10.1109/ASDAM.2000.889455
Filename :
889455
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2698591
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