DocumentCode :
2698624
Title :
Control positioning of torsional electrostatic actuators by current driving
Author :
Guardia, R. Nadal ; Aigner, R. ; Nessler, W. ; Handtmann, M. ; Castaner, L.M.
Author_Institution :
Universitat Politecnica de Catalunya
fYear :
2000
fDate :
2000
Firstpage :
91
Lastpage :
94
Keywords :
CMOS technology; Capacitance measurement; Control systems; Controllability; Electrodes; Electrostatic actuators; Equations; Microactuators; Parasitic capacitance; Voltage control;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on
Print_ISBN :
0-7803-5939-9
Type :
conf
DOI :
10.1109/ASDAM.2000.889457
Filename :
889457
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2698624
بازگشت