• DocumentCode
    2698624
  • Title

    Control positioning of torsional electrostatic actuators by current driving

  • Author

    Guardia, R. Nadal ; Aigner, R. ; Nessler, W. ; Handtmann, M. ; Castaner, L.M.

  • Author_Institution
    Universitat Politecnica de Catalunya
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    91
  • Lastpage
    94
  • Keywords
    CMOS technology; Capacitance measurement; Control systems; Controllability; Electrodes; Electrostatic actuators; Equations; Microactuators; Parasitic capacitance; Voltage control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on
  • Print_ISBN
    0-7803-5939-9
  • Type

    conf

  • DOI
    10.1109/ASDAM.2000.889457
  • Filename
    889457
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2698624