Design and investigation of SiO2 slab waveguide grating for photonics sensing application

Author

Jozef, Chovan ; FrantisÌŒek, Uherek ; Anton, Kristen ; Koza, Eduard ; Gabor, Patassy

Author_Institution

Int. laser center, Bratislava, Slovakia

fYear

2014

fDate

15-16 April 2014

Firstpage

1

Lastpage

4

Abstract

We report design and investigation of PECVD SiO2:N/SiO2 slab waveguide grating with a width modulation for sensing application at 1550 nm spectral range. The fundamental parameters of reflected spectrum by grating is simulated and investigated as a function of temperature, cover refractive index and strain. The apodization of designed slab waveguide grating is possible to be realized in one technological step.

Keywords

diffraction gratings; integrated optics; nitrogen; optical design techniques; optical sensors; optical waveguides; plasma CVD; refractive index; refractive index measurement; silicon compounds; strain measurement; strain sensors; temperature measurement; temperature sensors; PECVD; SiO₂:N-SiO₂; apodization; photonics sensing application; plasma-enhanced chemical vapor deposition; refractive index; slab waveguide grating design; strain sensitivity; temperature sensitivity; wavelength 1550 nm; width modulation; Gratings; Optical waveguides; Reflection; Refractive index; Sensitivity; Strain; Temperature sensors; grating; photonics sensing; waveguide;

fLanguage

English

Publisher

ieee

Conference_Titel

Radioelektronika (RADIOELEKTRONIKA), 2014 24th International Conference

Conference_Location

Bratislava

Print_ISBN

978-1-4799-3714-1

Type

conf

DOI

10.1109/Radioelek.2014.6828488

Filename

6828488