Title :
Design and investigation of SiO2 slab waveguide grating for photonics sensing application
Author :
Jozef, Chovan ; FrantisÌŒek, Uherek ; Anton, Kristen ; Koza, Eduard ; Gabor, Patassy
Author_Institution :
Int. laser center, Bratislava, Slovakia
Abstract :
We report design and investigation of PECVD SiO2:N/SiO2 slab waveguide grating with a width modulation for sensing application at 1550 nm spectral range. The fundamental parameters of reflected spectrum by grating is simulated and investigated as a function of temperature, cover refractive index and strain. The apodization of designed slab waveguide grating is possible to be realized in one technological step.
Keywords :
diffraction gratings; integrated optics; nitrogen; optical design techniques; optical sensors; optical waveguides; plasma CVD; refractive index; refractive index measurement; silicon compounds; strain measurement; strain sensors; temperature measurement; temperature sensors; PECVD; SiO2:N-SiO2; apodization; photonics sensing application; plasma-enhanced chemical vapor deposition; refractive index; slab waveguide grating design; strain sensitivity; temperature sensitivity; wavelength 1550 nm; width modulation; Gratings; Optical waveguides; Reflection; Refractive index; Sensitivity; Strain; Temperature sensors; grating; photonics sensing; waveguide;
Conference_Titel :
Radioelektronika (RADIOELEKTRONIKA), 2014 24th International Conference
Conference_Location :
Bratislava
Print_ISBN :
978-1-4799-3714-1
DOI :
10.1109/Radioelek.2014.6828488
