DocumentCode
2698973
Title
Possibilities of quantitative Makyoh topography
Author
Riesz, Ferenc ; Lukács, István E.
Author_Institution
Res. Inst. for Tech. Phys. & Mater., Hungarian Acad. of Sci., Budapest, Hungary
fYear
2000
fDate
2000
Firstpage
215
Lastpage
218
Abstract
Geometrical optical approaches to the reconstruction of surface topography from their Makyoh images are reviewed. A simple numerical algorithm is proposed for one-dimensional (1D) reconstruction. For the 2D case, the use of structured illumination is shown, and tentative results of an iterative algorithm are presented. Advantages and limitations of each method are discussed
Keywords
geometrical optics; image reconstruction; iterative methods; surface reconstruction; surface topography; surface topography measurement; 2D case; Makyoh images; geometrical optical approach; iterative algorithm; numerical algorithm; one-dimensional reconstruction; quantitative Makyoh topography; reconstruction; review; structured illumination; surface topography; Geometrical optics; Image reconstruction; Lighting; Optical imaging; Optical sensors; Optical surface waves; Reflectivity; Surface morphology; Surface reconstruction; Surface topography;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on
Conference_Location
Smolenice
Print_ISBN
0-7803-5939-9
Type
conf
DOI
10.1109/ASDAM.2000.889484
Filename
889484
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