DocumentCode
2699602
Title
Anodic alumina based electrostatic micro-relay MEMS device
Author
Efremov, G.I. ; Mukhurov, N.I. ; Kovalevsky, V.I.
Author_Institution
Inst. of Electron., Acad. of Sci., Minsk, Byelorussia
fYear
2000
fDate
2000
Firstpage
367
Lastpage
370
Abstract
The electrostatic micro-relay version described consists of a basic substrate and a plate with an elastic movable anchor formed of anodic alumina connected rigidly to each other. The correlation between electrostatic and reactive mechanical forces is given for the dynamic operation mode. This correlation could be applied to calculate movable elements of electrostatic micro-relays of analogous designs using other materials
Keywords
alumina; anodised layers; electromagnetic forces; electrostatic actuators; relays; Al2O3; anodic alumina based electrostatic micro-relay MEMS device; dynamic operation mode; elastic movable anchor; electrostatic forces; movable elements; reactive mechanical forces; substrate; Circuits; Contacts; Dielectric materials; Dielectric substrates; Elasticity; Electrodes; Electrostatics; Joining processes; Microelectromechanical devices; Microrelays;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on
Conference_Location
Smolenice
Print_ISBN
0-7803-5939-9
Type
conf
DOI
10.1109/ASDAM.2000.889522
Filename
889522
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