Title :
Anodic alumina based electrostatic micro-relay MEMS device
Author :
Efremov, G.I. ; Mukhurov, N.I. ; Kovalevsky, V.I.
Author_Institution :
Inst. of Electron., Acad. of Sci., Minsk, Byelorussia
Abstract :
The electrostatic micro-relay version described consists of a basic substrate and a plate with an elastic movable anchor formed of anodic alumina connected rigidly to each other. The correlation between electrostatic and reactive mechanical forces is given for the dynamic operation mode. This correlation could be applied to calculate movable elements of electrostatic micro-relays of analogous designs using other materials
Keywords :
alumina; anodised layers; electromagnetic forces; electrostatic actuators; relays; Al2O3; anodic alumina based electrostatic micro-relay MEMS device; dynamic operation mode; elastic movable anchor; electrostatic forces; movable elements; reactive mechanical forces; substrate; Circuits; Contacts; Dielectric materials; Dielectric substrates; Elasticity; Electrodes; Electrostatics; Joining processes; Microelectromechanical devices; Microrelays;
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on
Conference_Location :
Smolenice
Print_ISBN :
0-7803-5939-9
DOI :
10.1109/ASDAM.2000.889522
