Title :
Vertically arranged microelectrode array for electrochemical sensing
Author :
Rebacek, V. ; Novotny, I. ; Ivanic, R. ; Breternitz, V. ; Spiess, L. ; Knedlik, Ch ; Tvarozek, V.
Author_Institution :
Fac. of Electr. Eng. & Inf. Technol., Slovak Tech. Univ., Bratislava, Slovakia
Abstract :
We have developed a thin film cell consisting of a vertically arranged interdigital array (IDA) of electrodes with a continuous Pt-basis and an Y2O3 insulation layer in the middle separating the upper Pt IDA electrodes. We have optimized the technology of preparation of Y2O3 thin films with suitable electrical and mechanical properties. The electrochemical cell has been tested by cyclic voltammetry using the redox couple [Fe(CN)6]3-/4- in an electrolyte and the redox recycling phenomenon was demonstrated under these conditions
Keywords :
arrays; electrochemical electrodes; electrochemical sensors; microelectrodes; platinum; sputter deposition; voltammetry (chemical analysis); yttrium compounds; Fe(CN)6; Pt-Y2O3; Y2O3 insulation layer; [Fe(CN)6]3-/4-; continuous Pt-basis; cyclic voltammetry; electrical properties; electrochemical cell; electrochemical sensing; mechanical properties; redox couple; redox recycling phenomenon; thin film cell; vertically arranged interdigital array; vertically arranged microelectrode array; Compressive stress; Crystallography; Mechanical factors; Mechanical variables measurement; Microelectrodes; Optical films; Resists; Sputtering; Stress measurement; Tensile stress;
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on
Conference_Location :
Smolenice
Print_ISBN :
0-7803-5939-9
DOI :
10.1109/ASDAM.2000.889535
