• DocumentCode
    2700035
  • Title

    Reliability study of bilayer graphene - material for future transistor and interconnect

  • Author

    Yu, Tianhua ; Lee, Eun-Kyu ; Briggs, Benjamin ; Nagabhirava, Bhaskar ; Yu, Bin

  • Author_Institution
    Coll. of Nanoscale Sci. & Eng., Univ. at Albany, State Univ. of New York, Albany, NY, USA
  • fYear
    2010
  • fDate
    2-6 May 2010
  • Firstpage
    80
  • Lastpage
    83
  • Abstract
    Graphene is considered to be promising candidate for future transistor and interconnects material in integrated circuits because of its high intrinsic mobility and current-carrying capacity outperforming Cu. Particularly, bilayer graphene (BLG) systems offer controllable and wide band gap tunability without the need for nontrivial atomically precise nanoribbon patterning, which is indispensable to band gap engineering of monolayer graphene. Hence, novel devices consisting of BLG as both transistors and interconnects in combination with well-established Cu interconnects is conceivable. In this frame, this study has aimed to address reliability limiting factors of BLG/Cu contacts and current-carrying capacity.
  • Keywords
    copper; graphene; integrated circuit interconnections; transistors; Cu; bilayer graphene; bilayer graphene systems; current-carrying capacity; high intrinsic mobility; integrated circuits; interconnects material; nontrivial atomically precise nanoribbon patterning; reliability limiting factors; transistors; wide band gap tunability; Annealing; Contact resistance; Copper; Electric breakdown; Electric resistance; Fabrication; Integrated circuit interconnections; Materials reliability; Testing; Thermal conductivity; Bilayer graphene; breakdown; contact; current annealing; interconnect;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium (IRPS), 2010 IEEE International
  • Conference_Location
    Anaheim, CA
  • ISSN
    1541-7026
  • Print_ISBN
    978-1-4244-5430-3
  • Type

    conf

  • DOI
    10.1109/IRPS.2010.5488851
  • Filename
    5488851