DocumentCode
2701883
Title
Optimization of parametric yield: A tutorial
Author
Director, S.W. ; Feldmann, Peter ; Krishna, K.
fYear
1992
fDate
3-6 May 1992
Abstract
Yield loss can be characterized as either catastrophic or parametric. Catastrophic yield loss is primarily due to local, or spot, defects that occur in a manufacturing process. On the other hand, parametric yield loss is due to global disturbances, such as mask misalignment. In this paper we briefy eqdore these two different types of yield loss and then review some methods that have been developed to maximize parametric yield.
fLanguage
English
Publisher
ieee
Conference_Titel
Custom Integrated Circuits Conference, 1992., Proceedings of the IEEE 1992
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-0246-X
Type
conf
DOI
10.1109/CICC.1992.589963
Filename
5727276
Link To Document