DocumentCode
2701963
Title
Design and modelling of the integrated polymer microring resonators on silicon substrate
Author
Prajzler, V. ; Strilek, E. ; Huttel, I. ; Spirkova, J. ; Jerabek, V.
Author_Institution
Dept. of Microelectron., Czech Tech. Univ. in Prague, Prague, Czech Republic
fYear
2011
fDate
17-19 Oct. 2011
Firstpage
1
Lastpage
5
Abstract
We report about new polymer optical microresonators (OM) optical filters designed for operating wavelengths 1550 nm and filtering out wavelength 1490 nm. The first step was to design a single mode polymer waveguide by using BeamPROP™ software and after that a microring resonators were designed by Finite-Difference Time-Domain method using FullWAVE™ software. We also did modelling of three types of polymer waveguides for MR design structures. For all the structures we used Epoxy Novolak Resin polymer as core waveguide layer deposited on silicon substrate with a buffer layer between them. Three types of buffer layer were used - silica, Polymethylmethacrylate or Cytop layer while PMMA or Cytop were used as cover protection layer. Waveguides without cover protection layer were designed as well. Modelling of a single OM shows that the signal at 1490 nm is not sufficiently filtered out while the triple OM has sufficient transmission characteristics.
Keywords
buffer layers; finite difference time-domain analysis; integrated optics; light transmission; micro-optomechanical devices; micromechanical resonators; optical design techniques; optical filters; optical polymers; optical resonators; optical waveguides; physics computing; resins; BeamPROP™ software; Cytop layer; FullWAVE™ software; Si; buffer layer; core waveguide layer deposition; cover protection layer; epoxy Novolak resin polymer; finite-difference time-domain method; integrated polymer microring resonators; optical filter design; polymethylmethacrylate; silica layer; silicon substrate; single mode polymer waveguide; transmission characteristics; wavelength 1490 nm; wavelength 1550 nm; Optical buffering; Optical device fabrication; Optical filters; Optical polymers; Optical refraction; Optical waveguides;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics (ICP), 2011 IEEE 2nd International Conference on
Conference_Location
Kata Kinabalu
Print_ISBN
978-1-61284-265-3
Electronic_ISBN
978-1-61284-263-9
Type
conf
DOI
10.1109/ICP.2011.6106824
Filename
6106824
Link To Document