Title :
Sources and control of volatile gases hazardous to hermetic electronic enclosures
Author :
Lowry, Robert K.
Author_Institution :
Anal. Services Lab., Harris Semicond., Melbourne, FL, USA
Abstract :
Four gases that threaten operating reliability may be present in hermetic electronic enclosures. Condensates of moisture and/or ammonia can cause metallization corrosion. Hydrogen is a rapid diffuser that can degrade MOS device operation. Oxygen can cause oxidation and ensuing failure of solder attachment materials within the sealed package. Other gases, such as carbon dioxide, helium, argon, and organic volatiles are not threats to reliability, but do provide clues to package materials behaviour. Knowing sealed package ambient gas composition helps improve materials and processes for hermetic sealing and enables process control to assure reliable products. This paper describes the analysis method for hermetic microelectronics, residual gas analysis (RGA), available at only a few laboratories worldwide. It discusses sealing processes and package piece part materials that are sources of volatile gases hazardous to product reliability. It presents materials selection and improvement considerations to reduce and control dangerous volatiles in hermetic packages
Keywords :
chemical analysis; corrosion; gas mixtures; integrated circuit interconnections; integrated circuit metallisation; integrated circuit packaging; integrated circuit reliability; moisture; oxidation; process control; seals (stoppers); soldering; Ar; CO2; H2; H2O; He; MOS device operation; NH3; O2; ammonia condensates; argon gas; carbon dioxide gas; dangerous volatiles; hazardous volatile gases; helium gas; hermetic electronic enclosures; hermetic microelectronics; hermetic packages; hermetic sealing; hydrogen gas; materials selection; metallization corrosion; moisture condensates; operating reliability; organic volatiles; oxidation; oxygen gas; package materials behaviour; package piece part materials; process control; product reliability; rapid diffuser; reliability; reliable products; residual gas analysis; sealed package; sealed package ambient gas composition; sealing processes; solder attachment materials failure; volatile gas control; volatile gas sources; volatile gases; Corrosion; Gases; Hydrogen; MOS devices; Materials reliability; Metallization; Moisture; Packaging; Sealing materials; Thermal degradation;
Conference_Titel :
Advanced Packaging Materials: Processes, Properties and Interfaces, 1999. Proceedings. International Symposium on
Conference_Location :
Braselton, GA
Print_ISBN :
0-930815-56-4
DOI :
10.1109/ISAPM.1999.757294