Title :
SEM-EDX investigations of magnetron sputtered ZnO thin films
Author :
Jian Wei Hoon ; Chan, Kah Yoong ; Krishnasamy, Jegenathan ; Wong, Hin Yong ; Tou, Teck Yong
Author_Institution :
Fac. of Eng., Centre for Adv. Devices & Syst. (CADS), Multimedia Univ., Cyberjaya, Malaysia
Abstract :
Zinc oxide (ZnO) is a promising electronic material for transparent electronic applications including thin-film sensors, transistors and solar cells. In this work, we investigated the influence of direct current (DC) magnetron sputtering process parameter on ZnO films using scanning electron microscopy (SEM). The experimental results reveal an enhancement of the structural properties with increasing argon (Ar) pressure. The influence of the Ar pressure will be discussed in this paper.
Keywords :
II-VI semiconductors; X-ray chemical analysis; scanning electron microscopy; semiconductor growth; semiconductor thin films; sputter deposition; wide band gap semiconductors; zinc compounds; EDX; SEM; ZnO; direct current; electronic material; magnetron sputtering process; scanning electron microscopy; solar cell; thin film; transistor; Argon; Atomic layer deposition; Magnetic films; Optical films; Optical pumping; Optical sensors; Zinc oxide;
Conference_Titel :
Photonics (ICP), 2011 IEEE 2nd International Conference on
Conference_Location :
Kata Kinabalu
Print_ISBN :
978-1-61284-265-3
Electronic_ISBN :
978-1-61284-263-9
DOI :
10.1109/ICP.2011.6106835
