Title :
Surface Sensitivity Optimization of a Microring Resonator for Biochemical Sensing
Author :
Dell´Olio, Francesco ; Passaro, Vittorio M N ; De Leonardis, Francesco
Author_Institution :
Dipt. di Elettrotecnica ed Elettronica, Politecnico di Bari
Abstract :
A compact optical biosensor based on a microring resonator is proposed in this work. CMOS compatible technology based on silicon nitride deposited by low-pressure chemical vapour deposition (LPCVD) on silicon oxide has been adopted in the design. Surface sensing has been exploited, to be used in a wide range of biochemical applications, such as DNA sequencing by hybridization, antigen-antibody reactions study or pollution concentration measure in water. A semi-analytic approach supported by finite element method has been proposed to estimate and optimize the device sensitivity. Finally sensor functionality has been proved by finite difference time domain approach
Keywords :
CMOS integrated circuits; DNA; biochemistry; biological techniques; chemical sensors; chemical vapour deposition; finite difference time-domain analysis; finite element analysis; integrated optics; integrated optoelectronics; micro-optics; molecular biophysics; optical resonators; optical sensors; silicon compounds; CMOS compatible technology; DNA sequencing; SiN; SiO; antigen-antibody reactions; biochemical applications; biochemical sensing; device sensitivity; finite difference time domain approach; finite element method; hybridization; low-pressure chemical vapour deposition; microring resonator; optical biosensor; pollution concentration measurement; semianalytic approach; sensor functionality; silicon nitride deposition; silicon oxide substrate; surface sensing; surface sensitivity optimization; water pollution measurement; Biomedical optical imaging; Biosensors; CMOS technology; Chemical technology; Chemical vapor deposition; DNA; Optical resonators; Optical sensors; Silicon; Surface contamination; microring resonators; optical biosensors; surface sensing;
Conference_Titel :
Transparent Optical Networks, 2006 International Conference on
Conference_Location :
Nottingham
Print_ISBN :
1-4244-0235-2
Electronic_ISBN :
1-4244-0236-0
DOI :
10.1109/ICTON.2006.248516
