Title :
A portable MEMS Coriolis mass flow sensor
Author :
Sparks, D. ; Smith, R. ; Cripe, J. ; Schneider, R. ; Najafi, N.
Author_Institution :
Integrated Sensing Syst. Inc., Ypsilanti, MI, USA
Abstract :
In this paper, a micromachined Coriolis mass flow sensor is described. Key to portability, this resonant silicon sensor is vacuum packaged at the chip-level. A new MEMS gettering method was developed to accomplish high-vacuum packaging. Fluids flow through machined silicon microtubes. The tubes are driven electrostatically and monitored capacitively. Test data and applications are presented.
Keywords :
Coriolis force; flowmeters; micromachining; microsensors; silicon; fluids flow; gettering method; high-vacuum packaging; micromachined Coriolis mass flow sensor; portable MEMS sensor; resonant silicon sensor; silicon microtubes; vacuum packaging; Electrodes; Gettering; Glass; Microfluidics; Micromechanical devices; Packaging machines; Resonance; Resonant frequency; Silicon; Wafer bonding;
Conference_Titel :
Sensors, 2003. Proceedings of IEEE
Print_ISBN :
0-7803-8133-5
DOI :
10.1109/ICSENS.2003.1278953
