DocumentCode
2702400
Title
A portable MEMS Coriolis mass flow sensor
Author
Sparks, D. ; Smith, R. ; Cripe, J. ; Schneider, R. ; Najafi, N.
Author_Institution
Integrated Sensing Syst. Inc., Ypsilanti, MI, USA
Volume
1
fYear
2003
fDate
22-24 Oct. 2003
Firstpage
337
Abstract
In this paper, a micromachined Coriolis mass flow sensor is described. Key to portability, this resonant silicon sensor is vacuum packaged at the chip-level. A new MEMS gettering method was developed to accomplish high-vacuum packaging. Fluids flow through machined silicon microtubes. The tubes are driven electrostatically and monitored capacitively. Test data and applications are presented.
Keywords
Coriolis force; flowmeters; micromachining; microsensors; silicon; fluids flow; gettering method; high-vacuum packaging; micromachined Coriolis mass flow sensor; portable MEMS sensor; resonant silicon sensor; silicon microtubes; vacuum packaging; Electrodes; Gettering; Glass; Microfluidics; Micromechanical devices; Packaging machines; Resonance; Resonant frequency; Silicon; Wafer bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2003. Proceedings of IEEE
Print_ISBN
0-7803-8133-5
Type
conf
DOI
10.1109/ICSENS.2003.1278953
Filename
1278953
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