• DocumentCode
    2702415
  • Title

    FormFactor introduces an integrated process for wafer-level packaging, burn-in test, and module level assembly

  • Author

    Novitsky, John ; Pedersen, Dave

  • Author_Institution
    WOW Marketing, FormFactor Inc., Livermore, CA, USA
  • fYear
    1999
  • fDate
    14-17 Mar 1999
  • Firstpage
    226
  • Lastpage
    231
  • Abstract
    In semiconductor manufacturing, front end scaling (i.e. Moore´s Law) continues to hold for the forseeable future. Unfortunately, the back-end processes of package assembly, burn-in and test all require wafer singulation before any of these processes can occur. Singulation immediately forces a linearly increasing cost model, scaling with the number of die/wafer, and prevents a wafer scaling cost model. FormFactor looked at the issues preventing wafer-level back-end processing, and postulated that the highest probability of success would require an approach that integrated the previously separate disciplines of materials, package assembly, burn-in, and test. The connection element to the test and burn-in systems was identified as a primary enabler or inhibitor. In this paper, we briefly describe a wafer-level back-end flow, the chip scale package that this process defines, and the early results observed with this flow and package
  • Keywords
    assembling; chip scale packaging; integrated circuit reliability; integrated circuit testing; production testing; back-end processes; burn-in; chip scale package; cost model scaling; front end scaling; integrated process; linearly increasing cost model; module level assembly; package assembly; package materials; package test; process flow; semiconductor manufacturing; test/burn-in systems connection element; wafer scaling cost model; wafer singulation; wafer-level back-end flow; wafer-level back-end processing; wafer-level burn-in test; wafer-level packaging; Assembly; Chip scale packaging; Costs; Materials testing; Moore´s Law; Semiconductor device manufacture; Semiconductor device modeling; Semiconductor device packaging; System testing; Wafer scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Packaging Materials: Processes, Properties and Interfaces, 1999. Proceedings. International Symposium on
  • Conference_Location
    Braselton, GA
  • Print_ISBN
    0-930815-56-4
  • Type

    conf

  • DOI
    10.1109/ISAPM.1999.757317
  • Filename
    757317