Title :
Reliability of electroless nickel for high temperature applications [flip chip packaging]
Author :
Anh, Sabine ; Ostmann, Andreas ; Oppermann, Hermann ; Aschenbrenner, Rolf ; Reichl, Herbert
Author_Institution :
Microperipherical Center, Tech. Univ. Berlin, Germany
Abstract :
Electroless Ni/Au plating is interesting for flip chip due to its bumping cost reduction potential. Electroless Ni bumping provides selective autocatalytic deposition on Al wafer pads. For flip chip soldering, selective solder deposition on Ni bumps is essential. The greatest cost reduction potential is in solder paste stencil printing. The Ni under-bump metallization (UBM)/PbSn eutectic solder system shows excellent reliability. Results of long-term aging at 150°C and reliability tests are presented. AuSn or PbSn eutectic solders are used for high temperature applications. For 150°C-250°C operation, extended Ni-UBM reliability requirements are given. Electroless Ni bumps show an amorphous structure. At high temperatures, relaxation and crystallization effects were noted. During relaxation (>230°C), atoms move over small interatomic distances to a new reduced volume arrangement. Amorphous structure change could not be observed for this effect. At temperatures >320°C, crystallization with Ni and Ni 3P formation occurs. Crystallization includes further NiP alloy volume reduction, which can lead to Si cratering below Ni if an improper UBM thickness is used. Ni bump geometries are discussed. To study the electroless Ni structure, thermal analysis (DSC, thermomechanical analysis), X-ray diffraction and other measurements were carried out. Simplified Si crack formation models due to structure transformation are shown. Results of Ni-UBM phase formation and growth with AuSn/PbSn solders at 200°C are given. The influence of P on phase growth and impact on reliability at high temperatures are discussed
Keywords :
X-ray diffraction; ageing; crystallisation; differential scanning calorimetry; electroless deposited coatings; flip-chip devices; integrated circuit interconnections; integrated circuit metallisation; integrated circuit packaging; integrated circuit reliability; microassembling; nickel; soldering; thermal analysis; thermal stress cracking; 150 to 250 C; 183 C; 200 C; 230 C; 320 C; Al wafer pads; AuSn eutectic solder; DSC; Ni bumps; Ni formation; Ni under-bump metallization/PbSn eutectic solder system; Ni-AuSn; Ni-PbSn; Ni-UBM phase formation; Ni-UBM reliability; Ni3P formation; NiP alloy volume reduction; PbSn eutectic solder; Si crack formation models; Si cratering; UBM thickness; X-ray diffraction; amorphous structure; bumping cost reduction; cost reduction; crystallization; crystallization effects; electroless Ni bumping; electroless Ni bumps; electroless Ni structure; electroless Ni/Au plating; electroless nickel; flip chip; flip chip packaging; flip chip soldering; high temperature applications; high temperature reliability; long-term aging; phase growth; relaxation effects; reliability; reliability tests; selective autocatalytic deposition; selective solder deposition; solder paste stencil printing; structure transformation; thermal analysis; thermomechanical analysis; Amorphous materials; Costs; Crystallization; Flip chip; Gold; Metallization; Nickel; Printing; Soldering; Temperature;
Conference_Titel :
Advanced Packaging Materials: Processes, Properties and Interfaces, 1999. Proceedings. International Symposium on
Conference_Location :
Braselton, GA
Print_ISBN :
0-930815-56-4
DOI :
10.1109/ISAPM.1999.757323