DocumentCode

2702556

Title

A Micro Step Structures Motion Of Polysilicon On Silicon Substrate

Author

Zhu, Junqi ; Akiyama, Terunobu ; Shono, Katsufusa

fYear

1993

fDate

9-11 Jun 1993

Firstpage

85

Lastpage

88

Keywords

Blades; CMOS process; CMOS technology; Dry etching; Fabrication; Insulators; Microstructure; Silicon; Substrates; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International

Print_ISBN

0-7803-1432-8

Type

conf

DOI

10.1109/IEMT.1993.639359

Filename

639359