DocumentCode
2702606
Title
Accurate model of the dynamic response of a capacitive humidity sensor
Author
Tetelin, Angelique ; Pellet, Claude
Author_Institution
CNRS UMR, Bordeaux Univ., Talence, France
Volume
1
fYear
2003
fDate
22-24 Oct. 2003
Firstpage
378
Abstract
This paper presents a model simulating the transient response of a capacitive humidity sensor made of a polymer sensitive film. The model is based on the theory of molecule diffusion in polymer films. The confrontation of this model with finite element simulation and experimental results demonstrates its accuracy. This model could be implemented in a microprocessor for data extraction.
Keywords
capacitive sensors; finite element analysis; humidity sensors; polymer films; simulation; capacitive sensor; data extraction; finite element simulation; humidity sensor; microprocessor; molecule diffusion; polymer films; sensor modeling; transient response; Bars; Capacitance; Capacitive sensors; Chemical sensors; Electrodes; Humidity; Polymers; Sensor phenomena and characterization; Temperature sensors; Transient response;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2003. Proceedings of IEEE
Print_ISBN
0-7803-8133-5
Type
conf
DOI
10.1109/ICSENS.2003.1278962
Filename
1278962
Link To Document