Title :
Design of a micro six-axis force sensor based on double layer E-type membrane
Author :
Yang, Weichao ; Song, Bo ; Yu, Yong ; Ge, Yunjian
Author_Institution :
Inst. of Intell. Machines, Chinese Acad. of Sci., Hefei
Abstract :
The elastic body structure of six-axis force sensor based on the double layer E-type membrane has been used in the normal situation maturely. In this paper, the possibility of the same elastic body structure used in the micro-operation is discussed. The working principle of the sensor structure is introduced firstly, and the static and dynamic characteristics of the elastic body are obtained by finite element analysis. The results demonstrate that six-axis force sensor with this kind of structure can be used in micro-operation and the sensor has high sensitivities, high linearity and almost no static couple in each axis.
Keywords :
finite element analysis; force sensors; membranes; microsensors; double layer E-type membrane; dynamic characteristics; elastic body structure; finite element analysis; microoperation; microsix-axis force sensor design; static characteristics; Biomembranes; Capacitive sensors; Design automation; Finite element methods; Flanges; Force measurement; Force sensors; Intelligent sensors; Machine intelligence; Sensor phenomena and characterization; Double layer E-type membrane; Elastic body; Finite elements method; Six-axis force sensor;
Conference_Titel :
Information and Automation, 2008. ICIA 2008. International Conference on
Conference_Location :
Changsha
Print_ISBN :
978-1-4244-2183-1
Electronic_ISBN :
978-1-4244-2184-8
DOI :
10.1109/ICINFA.2008.4608265
