Using Data Mining Techniques in Development of MURA Geometric Prediction Module for Large Area Photomask

Data Mining is concerned with the different applications for discovery of a priori unknown relationships such as associations, groupings, and classifiers from data. The solution of MURA problems in producing to the large photomask industry is finding the association rules or the algorithms for learning classifiers from relational data. In this paper, we designed and developed a MURA related association rules which are suitable for the MURA model requirements, and we named MURA Risk rating system. Our purpose is to figure out the effective application of data mining algorithms in monitoring and control of complex Large Area Photomask systems. We combine the Data Mining into MURA risk management. It is indeed saving time from standby machine, and expectation of the photomask processing graphic of MURA problems. By our scheme and MURA risk rating system, we can shorten the time and reduce the MURA problems.