Title : 
Nonvolatile Memory Based On Reversible Phase Transition In Chalcogenide Semiconductor Thin Film
         
        
            Author : 
Nakayama, Kazuya ; Kitagawa, Toshiya ; Hashimoto, Kazunari ; Ohtuka, Keisuke ; Kitagawa, Akio ; Suzuki, Masakuni
         
        
        
        
        
        
            Keywords : 
Amorphous semiconductors; Buffer layers; Crystalline materials; Crystallization; Electric resistance; Electrodes; Nonvolatile memory; Semiconductor films; Semiconductor thin films; Tellurium;
         
        
        
        
            Conference_Titel : 
Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
         
        
            Print_ISBN : 
0-7803-1432-8
         
        
        
            DOI : 
10.1109/IEMT.1993.639363