A 16-channel array-type microspectrometer using integrated Fabry-Perot etalons and lateral pin photodetectors

In this paper, we describe an integrated array type microspectrometer based on Fabry-Perot etalons. The spectral analysis of visible light is achieved by an array of Fabry-Perot etalons with different resonance gaps. Each resonance gap is determined by the central deflection of prebuckled bridge when it is in the down position. In this design, the microspectrometer has 16-channels, each channel only allows one single peak of narrow wavelength band to pass. The fabrication of 16-channel can be done with only one lithography process without N subsequent etching steps. An array of photodetectors is also integrated beneath the Fabry-Perot etalons to form the microspectrometer.