Title :
Numerical Technique for the Analysis of 3D MEMS Structures with Sinusoidal Motion
Author :
Mori, Takashi ; Iwamatsu, Hiroshi ; Kanno, Takamichi ; Kuroda, Michiko
Author_Institution :
Sch. of Comput. Sci., Tokyo Univ. of Technol.
Abstract :
In this paper, the modeling technique of 3D MEMS structures with sinusoidal motion is proposed. This technique is a combination of the FDTD method and the body fitted grid generation technique. The numerical results of the field plot is shown for a MEMS capacitor with sinusoidal motion and demonstrate its unique computational advantages in the modeling of microwave devices and/or optical devices with moving boundaries
Keywords :
capacitors; finite difference time-domain analysis; mesh generation; micromechanical devices; microwave devices; 3D MEMS structures; FDTD method; MEMS capacitor; body fitted grid generation technique; field plot; microwave devices; modeling technique; moving boundaries; numerical technique; optical devices; sinusoidal motion; Capacitors; Computer science; Electromechanical devices; Equations; Fabrication; Micromechanical devices; Motion analysis; Physics computing; Radio frequency; Switches;
Conference_Titel :
Antennas and Propagation Society International Symposium 2006, IEEE
Conference_Location :
Albuquerque, NM
Print_ISBN :
1-4244-0123-2
DOI :
10.1109/APS.2006.1711449
