DocumentCode
2704455
Title
ACC oscillator for in-liquid quartz microbalance sensors
Author
Ferrari, Vittorio ; Marioli, Daniele ; Taroni, Andrea
Author_Institution
Dip. Elettronica per l´´Automazione & INFM, Brescia Univ., Italy
Volume
2
fYear
2003
fDate
22-24 Oct. 2003
Firstpage
849
Abstract
An oscillator design is presented that provides accurate tracking of the series resonant frequency of liquid-loaded thickness-shear mode (TSM) quartz microbalance sensors. This is obtained by means of the automatic capacitance compensation (ACC) of the sensor parallel capacitance, without any manual adjustment required The oscillator advantageously outputs three signals respectively related to the sensor series resonant frequency, quality factor, and compensated parallel capacitance. Experimental results are reported that were obtained with 10-MHz crystals double-side immersed into several liquids with different acoustic and dielectric loading levels.
Keywords
Q-factor; microbalances; micromechanical resonators; microsensors; oscillators; ACC oscillator; automatic capacitance compensation; compensated parallel capacitance; in-liquid quartz microbalance sensors; liquid-loaded thickness-shear mode microbalance sensors; oscillator design; quality factor; sensor parallel capacitance; series resonant frequency; Acoustic sensors; Capacitive sensors; Circuits; Oscillators; Parasitic capacitance; Q factor; Resonance; Resonant frequency; Sensor phenomena and characterization; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2003. Proceedings of IEEE
Print_ISBN
0-7803-8133-5
Type
conf
DOI
10.1109/ICSENS.2003.1279063
Filename
1279063
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