Title :
ACC oscillator for in-liquid quartz microbalance sensors
Author :
Ferrari, Vittorio ; Marioli, Daniele ; Taroni, Andrea
Author_Institution :
Dip. Elettronica per l´´Automazione & INFM, Brescia Univ., Italy
Abstract :
An oscillator design is presented that provides accurate tracking of the series resonant frequency of liquid-loaded thickness-shear mode (TSM) quartz microbalance sensors. This is obtained by means of the automatic capacitance compensation (ACC) of the sensor parallel capacitance, without any manual adjustment required The oscillator advantageously outputs three signals respectively related to the sensor series resonant frequency, quality factor, and compensated parallel capacitance. Experimental results are reported that were obtained with 10-MHz crystals double-side immersed into several liquids with different acoustic and dielectric loading levels.
Keywords :
Q-factor; microbalances; micromechanical resonators; microsensors; oscillators; ACC oscillator; automatic capacitance compensation; compensated parallel capacitance; in-liquid quartz microbalance sensors; liquid-loaded thickness-shear mode microbalance sensors; oscillator design; quality factor; sensor parallel capacitance; series resonant frequency; Acoustic sensors; Capacitive sensors; Circuits; Oscillators; Parasitic capacitance; Q factor; Resonance; Resonant frequency; Sensor phenomena and characterization; Viscosity;
Conference_Titel :
Sensors, 2003. Proceedings of IEEE
Print_ISBN :
0-7803-8133-5
DOI :
10.1109/ICSENS.2003.1279063