Analyzing and simulation of MEMS in VHDL-AMS based on reduced order FE-models

This paper deals with the computer-aided generation of Reduced Order Macromodels (ROM) for system level simulation using VHDL-AMS. The application of ROM on system level will be demonstrated by two surface micromachined vibration sensor arrays which are intended for wear state recognition on highly stressed machine tools. The paper will discuss how to export the macromodel from FEM data into VHDL-AMS and it presents a new approach called "Multi Architecture Modeling" which simplifies the integration of macromodels in the system environment. Furthermore, the performance of the macromodels for analyzing and simulating on system level will be shown and compared with abstract models and measurements.