Title :
Cavity-backed MEMS patch antennas on double-layer silicon wafers
Author :
Koga, Yoko ; Yoshida, Yukihisa ; Yamashita, Akira ; Hamaguchi, Tsuneo ; Nishizawa, Kazushi ; Taguchi, Motohisa ; Nishino, Tamotsu ; Miyashita, Hiroaki ; Makino, Shigeru
Author_Institution :
Inf. Technol. R&D Center, Mitsubishi Electr. Corp., Kamakura
Abstract :
This paper presents cavity-backed patch antennas on a double-layer silicon wafer. The developed antenna has flexibility for obtaining the desired equivalent dielectric constant under the limit of the wafer thickness, because a depth of cavity on each wafer can be adjusted with each other. The wide band characteristic of this antenna has been shown by simulation, and the experimental results at millimeter wave have also been presented
Keywords :
broadband antennas; micromechanical devices; microstrip antennas; millimetre wave antennas; permittivity; silicon; cavity depth; cavity-backed MEMS patch antennas; double-layer silicon wafers; equivalent dielectric constant; millimeter wave; wafer thickness; wide band characteristic; Antennas and propagation; Bandwidth; Dielectric losses; Micromechanical devices; Microstrip antennas; Patch antennas; Radio frequency; Research and development; Resins; Silicon;
Conference_Titel :
Antennas and Propagation Society International Symposium 2006, IEEE
Conference_Location :
Albuquerque, NM
Print_ISBN :
1-4244-0123-2
DOI :
10.1109/APS.2006.1711486
