DocumentCode
2704617
Title
Finite element modeling and analysis of multi-channel quartz crystal microbalance
Author
Lu, F. ; Lee, H.P. ; Lim, S.P.
Author_Institution
Dept. of Mech. Eng., Nat. Univ. of Singapore, Singapore
Volume
2
fYear
2003
fDate
22-24 Oct. 2003
Firstpage
888
Abstract
Multi-channel Quartz Crystal Microbalance (MQCM) devices have many promising potential applications as sensors in biological engineering. In this work, a finite element modeling of the Multi-channel QCM is constructed using ANSYS. The coupling interference between two adjacent QCMs will affect a MQCM in measuring the surface loading quantitatively. For reduction of the interference, grooves are created between the QCMs. The thickness shearing mode vibration is found to be trapped by the grooves. The effects of the groove on the frequency interference are studied.
Keywords
biosensors; crystal resonators; finite element analysis; microbalances; microsensors; ANSYS; biological engineering; coupling interference; finite element modeling; frequency interference; multi-channel quartz crystal microbalance; sensors; surface loading; thickness shearing mode vibration; Biological system modeling; Electrodes; Equivalent circuits; Finite element methods; Frequency; Interference; Semiconductor device modeling; Sensor arrays; Shearing; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2003. Proceedings of IEEE
Print_ISBN
0-7803-8133-5
Type
conf
DOI
10.1109/ICSENS.2003.1279070
Filename
1279070
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