Title :
Finite element modeling and analysis of multi-channel quartz crystal microbalance
Author :
Lu, F. ; Lee, H.P. ; Lim, S.P.
Author_Institution :
Dept. of Mech. Eng., Nat. Univ. of Singapore, Singapore
Abstract :
Multi-channel Quartz Crystal Microbalance (MQCM) devices have many promising potential applications as sensors in biological engineering. In this work, a finite element modeling of the Multi-channel QCM is constructed using ANSYS. The coupling interference between two adjacent QCMs will affect a MQCM in measuring the surface loading quantitatively. For reduction of the interference, grooves are created between the QCMs. The thickness shearing mode vibration is found to be trapped by the grooves. The effects of the groove on the frequency interference are studied.
Keywords :
biosensors; crystal resonators; finite element analysis; microbalances; microsensors; ANSYS; biological engineering; coupling interference; finite element modeling; frequency interference; multi-channel quartz crystal microbalance; sensors; surface loading; thickness shearing mode vibration; Biological system modeling; Electrodes; Equivalent circuits; Finite element methods; Frequency; Interference; Semiconductor device modeling; Sensor arrays; Shearing; Vibrations;
Conference_Titel :
Sensors, 2003. Proceedings of IEEE
Print_ISBN :
0-7803-8133-5
DOI :
10.1109/ICSENS.2003.1279070
