DocumentCode
2704739
Title
Open resonator technique for measuring multi-layer dielectrics
Author
Wang, Shoujun ; Xu, Deming ; Hu, Lele
Author_Institution
Sch. of Commun. & Inf. Eng., Shanghai Univ., China
Volume
3
fYear
1997
fDate
2-5 Dec 1997
Firstpage
885
Abstract
In our present work, the open resonator technique is extended to measure multi-layer dielectrics. The difficulties that limit the open resonator for measuring easy warped thin films can be overcome by flattening a heavy sample to eliminate air gaps. Applying the simply equipped length-varying method, measurements on several thin films were carried out and encouraging results achieved
Keywords
cavity resonators; dielectric thin films; millimetre wave measurement; permittivity measurement; MM wave region; Q-factor; air gaps elimination; complex permittivity measurement; double-layer samples; flattening; heavy sample; length-varying method; multilayer dielectrics measurement; open resonator technique; scalar Gaussian beam theory; warped thin films; Air gaps; Dielectric materials; Dielectric measurements; Dielectric thin films; Length measurement; Mirrors; Permittivity measurement; Position measurement; Thickness measurement; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference Proceedings, 1997. APMC '97, 1997 Asia-Pacific
Print_ISBN
962-442-117-X
Type
conf
DOI
10.1109/APMC.1997.656340
Filename
656340
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