Title :
Design and Fabrication of a Novel Micro Angle Sensor
Author :
Sayyaf, N. ; Barazandeh, F. ; Nejad, S. Nazari ; Razfar, M.R.
Author_Institution :
Dept. of Mech. Eng., Amirkabir Univ. of Technol., Tehran, Iran
Abstract :
A novel angle sensor which works based on Lorentz force and capacitors is presented. The structure consists of two bending beams and the angle will expose by displacement of the beams. The bulk micromachining technology is employed to fabricate the sensor on silicon substrate. The suggested micro angle sensor is accurate and contactless.
Keywords :
Capacitance; Capacitive sensors; Capacitors; Fabrication; Magnetic field measurement; Magnetic materials; Magnetic sensors; Mechanical sensors; Micromachining; Pollution measurement; Hall Effect; MEMS; Microfabrication; bulk micromachining; micro angle sensor;
Conference_Titel :
MEMS, NANO, and Smart Systems (ICMENS), 2009 Fifth International Conference on
Conference_Location :
Dubai, United Arab Emirates
Print_ISBN :
978-0-7695-3938-6
Electronic_ISBN :
978-1-4244-5616-1
DOI :
10.1109/ICMENS.2009.12
