Hybrid magnetic suspension actuator for motion control apparatus

This paper presents a new MS actuator design for vibration absorption in motion control. In the hybrid magnetic configuration, two permanent magnets are embedded into the stationary base and the motion support to result in a spring effect in the mechanical system, together with an electromagnet to exert controllable force onto the motion support. To achieve the expected performance, appropriate feedback control system design for this MS system is applied. In this paper, the verification dynamic characteristics of MS actuator, as well as its applications are described.