Biological element detection sensor application of micromachined PZT thick film cantilever

Author

Kim, Hyung Joon ; Kim, Yong-Bum ; Park, Jaebum ; Kim, Tae Song

Author_Institution

Microsystem Res. Center, KIST, Seoul, South Korea

Volume

2

fYear

2003

fDate

22-24 Oct. 2003

Firstpage

1054

Abstract

A highly sensitive monolithic cantilever sensor for mass detection has been successfully fabricated with PZT (52/48) thick films prepared on Pt/TiO₂/YSZ/SiO₂/Si substrate by new hybrid method based on the screen-printing. The shorter cantilever is more sensitive for mass change and can defect ng level mass change in aqueous environment even though the sensitivity of cantilever decreases due to viscous damping. Also, the capability of thick film cantilever for biosensor application has been verified. It is quantitatively investigated that the resonance frequency change of cantilever can be affected from the biological element binding such as streptavidin-biotin binding and prostate specific antigen (PSA)-antibody interaction on a PSA antibody immobilized Au surface.

Keywords

biosensors; lead compounds; mass measurement; micromachining; piezoelectric actuators; thick films; PZT; PbZrO3TiO3; Pt-TiO₂-Y₂O₃ZrO₂-SiO₂-Si; Pt/TiO₂/YSZ/SiO₂/Si substrate; antibody immobilized Au surface; biological element binding; biological element detection sensor application; mass change; micromachined PZT thick film cantilever; prostate specific antigen-antibody interaction; screen-printing; streptavidin-biotin binding; viscous damping; Biomembranes; Biosensors; Electrodes; Powders; Printing; Resonance; Resonant frequency; Sputtering; Thick film sensors; Thick films;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2003. Proceedings of IEEE

Print_ISBN

0-7803-8133-5

Type

conf

DOI

10.1109/ICSENS.2003.1279104

Filename

1279104