A solid-state hydrocarbon sensor for environmental applications

Author

Gurbuz, Y. ; Kang, W.P. ; Davidson, J.L. ; Kerns, D.V.

Author_Institution

Fac. of Eng. & Natural Sci., Sabanci Univ., Istanbul, Turkey

Volume

2

fYear

2003

fDate

22-24 Oct. 2003

Firstpage

1159

Abstract

We have applied CVD (chemical vapor deposition) diamond chemical sensor to detect benzene and toluene, volatile organic compounds, possible indication of the existence of environmental hazardous and petroleum in soil/subsoil. Steady-state and transient response of the sensor for both gases have been extensively studied. These studies have shown that the sensor shows a large sensitivity, fast response, high selectivity, large dynamic range, repeatable/reproducible response for the detection of benzene and toluene gases. Activation energy analysis of the sensor for both gases resulted very small values, confirming fast response and high selectivity.

Keywords

CVD coatings; diamond; elemental semiconductors; gas sensors; organic compounds; semiconductor thin films; soil pollution; C; CVD; benzene; chemical vapor deposition; environmental applications; environmental hazardous materials; fast response; high selectivity; large dynamic range; large sensitivity; petroleum; repeatable/reproducible response; soil; solid-state hydrocarbon sensor; steady-state response; subsoil; toluene; transient response; volatile organic compounds; Chemical sensors; Chemical vapor deposition; Gas detectors; Gases; Hydrocarbons; Petroleum; Soil; Solid state circuits; Steady-state; Volatile organic compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2003. Proceedings of IEEE

Print_ISBN

0-7803-8133-5

Type

conf

DOI

10.1109/ICSENS.2003.1279126

Filename

1279126