Title :
A microstructure semiconductor thermocouple for microwave power sensors
Author :
Chen Deyong ; Cui Dafu ; Han Jinghong ; Chen Shaofeng ; Li, Wang ; Zigao, Li ; Binxiang, Fu
Author_Institution :
Inst. of Electron., Acad. Sinica, Beijing, China
Abstract :
By using standard silicon planar process, combined with an anisotropically etch technology, a microstructure Si-Ta2N thermocouple for microwave power sensors has been fabricated. The sensor has a sensitivity as high as 200 μV/mW over a frequency range of 10 MHz to 18 GHz at a power level from 1 μW to 100 mW
Keywords :
elemental semiconductors; etching; microwave detectors; power measurement; silicon; tantalum compounds; thermocouples; 1 muW to 100 mW; 10 MHz to 18 GHz; Si-Ta2N; anisotropic etching; microstructure semiconductor thermocouple; microwave power sensor; silicon planar process; Anisotropic magnetoresistance; Frequency; Microstructure; Microwave sensors; Power measurement; Silicon; Sputter etching; Temperature sensors; Thermal sensors; Thermistors;
Conference_Titel :
Microwave Conference Proceedings, 1997. APMC '97, 1997 Asia-Pacific
Print_ISBN :
962-442-117-X
DOI :
10.1109/APMC.1997.656348
