Title :
Super Uniform Silicon Photo Diode Covering From The UV To IR Regions
Author :
Fujii, Yoshimaro ; Mori, Harumichi ; Kyuushima, Ryuuji ; Usami, Akira ; Wada, Takao
Keywords :
Control systems; Diodes; Equations; Fabrication; Fourier transforms; Linearity; Photoconductivity; Photodiodes; Signal to noise ratio; Silicon;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
Print_ISBN :
0-7803-1432-8
DOI :
10.1109/IEMT.1993.639381
