Analytical tool for electro-thermal modelling of microbolometers

Author

ZajaÌ§c, Piotr ; Maj, Cezary ; Szermer, Michal ; Lobur, M. ; Napieralski, A.

Author_Institution

Dept. of Microelectron. & Comput. Sci., Tech. Univ. of Lodz, Lodz, Poland

fYear

2014

fDate

7-9 April 2014

Firstpage

1

Lastpage

6

Abstract

In this paper we present a tool which incorporates an analytical model of a microbolometer. Within the tool the user can freely change the input parameters such as dimensions and material properties and immediately obtain output parameters such as responsivity, thermal time constant etc. Moreover, the tool can be used to compute the transient thermal response of the microbolometer for a given radiation power and bias current. The model was validated against the results obtained from ANSYS for several different devices and the maximal relative error in transient temperature response was found to be only 3%.

Keywords

bolometers; finite element analysis; microsensors; transient response; ANSYS; analytical model; bIas current; electrothermal modelling; maximal relative error; microbolometer; radiation power; transient temperature response; transient thermal response compution; Abstracts; Finite element analysis; Materials; Thermal resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems (eurosime), 2014 15th international conference on

Conference_Location

Ghent

Print_ISBN

978-1-4799-4791-1

Type

conf

DOI

10.1109/EuroSimE.2014.6813826

Filename

6813826