Title :
Analytical tool for electro-thermal modelling of microbolometers
Author :
Zaja̧c, Piotr ; Maj, Cezary ; Szermer, Michal ; Lobur, M. ; Napieralski, A.
Author_Institution :
Dept. of Microelectron. & Comput. Sci., Tech. Univ. of Lodz, Lodz, Poland
Abstract :
In this paper we present a tool which incorporates an analytical model of a microbolometer. Within the tool the user can freely change the input parameters such as dimensions and material properties and immediately obtain output parameters such as responsivity, thermal time constant etc. Moreover, the tool can be used to compute the transient thermal response of the microbolometer for a given radiation power and bias current. The model was validated against the results obtained from ANSYS for several different devices and the maximal relative error in transient temperature response was found to be only 3%.
Keywords :
bolometers; finite element analysis; microsensors; transient response; ANSYS; analytical model; bIas current; electrothermal modelling; maximal relative error; microbolometer; radiation power; transient temperature response; transient thermal response compution; Abstracts; Finite element analysis; Materials; Thermal resistance;
Conference_Titel :
Thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems (eurosime), 2014 15th international conference on
Conference_Location :
Ghent
Print_ISBN :
978-1-4799-4791-1
DOI :
10.1109/EuroSimE.2014.6813826
