• DocumentCode
    2707106
  • Title

    Study on Synthesis Process of Carbon Nanotubes by CCVD at Lower Temperature

  • Author

    Liu, Bai ; Liu, Xiujuan ; Zhao, Zhenyu ; Tang, Fei

  • Author_Institution
    Dept. of Inf. Control & Manuf., Shenzhen Inst. of Inf. Technol., Shenzhen, China
  • fYear
    2009
  • fDate
    28-30 Dec. 2009
  • Firstpage
    122
  • Lastpage
    124
  • Abstract
    Carbon nanotubes and the Synthesis methods were studied in this paper. A sort of multi-wall carbon nanotubes was synthesized by Ni catalytic chemical vapor deposition (CCVD). The influences of some factors on the growth of CNTs, such as the temperature in reaction, the time, the different gas flow, were investigated. The results show that in the test the best temperature in reaction is 750, the best gas flow are C2H2 = 10-20ml/min and N2+H2 = 600-800ml/min, the best growth time is from 60 to 70 min.
  • Keywords
    carbon nanotubes; chemical vapour deposition; CCVD; catalytic chemical vapor deposition; gas flow; multiwall carbon nanotubes; synthesis methods; time 60 min to 70 min; Annealing; Carbon nanotubes; Chemical sensors; Chemical vapor deposition; Control system synthesis; Fluid flow; Furnaces; Hydrogen; Morphology; Temperature; CCVD; Carbon nanotubes; Process; Synthesis;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    MEMS, NANO, and Smart Systems (ICMENS), 2009 Fifth International Conference on
  • Conference_Location
    Dubai
  • Print_ISBN
    978-0-7695-3938-6
  • Electronic_ISBN
    978-1-4244-5616-1
  • Type

    conf

  • DOI
    10.1109/ICMENS.2009.18
  • Filename
    5489358