Title :
Study on Synthesis Process of Carbon Nanotubes by CCVD at Lower Temperature
Author :
Liu, Bai ; Liu, Xiujuan ; Zhao, Zhenyu ; Tang, Fei
Author_Institution :
Dept. of Inf. Control & Manuf., Shenzhen Inst. of Inf. Technol., Shenzhen, China
Abstract :
Carbon nanotubes and the Synthesis methods were studied in this paper. A sort of multi-wall carbon nanotubes was synthesized by Ni catalytic chemical vapor deposition (CCVD). The influences of some factors on the growth of CNTs, such as the temperature in reaction, the time, the different gas flow, were investigated. The results show that in the test the best temperature in reaction is 750, the best gas flow are C2H2 = 10-20ml/min and N2+H2 = 600-800ml/min, the best growth time is from 60 to 70 min.
Keywords :
carbon nanotubes; chemical vapour deposition; CCVD; catalytic chemical vapor deposition; gas flow; multiwall carbon nanotubes; synthesis methods; time 60 min to 70 min; Annealing; Carbon nanotubes; Chemical sensors; Chemical vapor deposition; Control system synthesis; Fluid flow; Furnaces; Hydrogen; Morphology; Temperature; CCVD; Carbon nanotubes; Process; Synthesis;
Conference_Titel :
MEMS, NANO, and Smart Systems (ICMENS), 2009 Fifth International Conference on
Conference_Location :
Dubai
Print_ISBN :
978-0-7695-3938-6
Electronic_ISBN :
978-1-4244-5616-1
DOI :
10.1109/ICMENS.2009.18
