DocumentCode
2707106
Title
Study on Synthesis Process of Carbon Nanotubes by CCVD at Lower Temperature
Author
Liu, Bai ; Liu, Xiujuan ; Zhao, Zhenyu ; Tang, Fei
Author_Institution
Dept. of Inf. Control & Manuf., Shenzhen Inst. of Inf. Technol., Shenzhen, China
fYear
2009
fDate
28-30 Dec. 2009
Firstpage
122
Lastpage
124
Abstract
Carbon nanotubes and the Synthesis methods were studied in this paper. A sort of multi-wall carbon nanotubes was synthesized by Ni catalytic chemical vapor deposition (CCVD). The influences of some factors on the growth of CNTs, such as the temperature in reaction, the time, the different gas flow, were investigated. The results show that in the test the best temperature in reaction is 750, the best gas flow are C2H2 = 10-20ml/min and N2+H2 = 600-800ml/min, the best growth time is from 60 to 70 min.
Keywords
carbon nanotubes; chemical vapour deposition; CCVD; catalytic chemical vapor deposition; gas flow; multiwall carbon nanotubes; synthesis methods; time 60 min to 70 min; Annealing; Carbon nanotubes; Chemical sensors; Chemical vapor deposition; Control system synthesis; Fluid flow; Furnaces; Hydrogen; Morphology; Temperature; CCVD; Carbon nanotubes; Process; Synthesis;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO, and Smart Systems (ICMENS), 2009 Fifth International Conference on
Conference_Location
Dubai
Print_ISBN
978-0-7695-3938-6
Electronic_ISBN
978-1-4244-5616-1
Type
conf
DOI
10.1109/ICMENS.2009.18
Filename
5489358
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