A wideband circuit model of on-chip spiral inductor in 0.13µm CMOS process

In this paper, a simple wideband circuit model for on-chip spiral inductors is presented. The model shows excellent agreement with measured data mostly within 4.91% across a variety of inductor geometries up to 20 GHz. The proposed model has been verified with measured results of inductors fabricated in 0.13 μm CMOS process. The inductors have two dimensions: turn and inner radius. The new model accurately captures series resistance and inductance over a wide frequency range, even beyond the self-resonant frequency.