Evaluation of materials used in cleanrooms with ESD sensitive hardware

Author

Lesniewski, Tom ; Yates, Kenn

Author_Institution

Space & Electron. Group, TRW Inc., Redondo Beach, CA, USA

fYear

2000

fDate

26-28 Sept. 2000

Firstpage

166

Lastpage

179

Abstract

Measurements were done on nearly 90 products to determine their cleanliness and ESD protective properties. Categories of materials tested include floor tiles and mats, gloves, finger cots, bags and sheeting materials, garments, swabs and wipes. A variety of test methods was used to evaluate the materials. The results showed that few products had both nonvolatile residue less than 1 mg/ft/sup 2/ and static dissipative properties.

Keywords

clean rooms; electrostatic discharge; integrated circuit manufacture; materials handling; materials testing; packaging; protection; surface contamination; ESD protective properties; ESD sensitive hardware; bags; cleanliness; cleanroom materials; cleanrooms; finger cots; floor mats; floor tiles; garments; gloves; nonvolatile residue; product measurements; sheeting materials; static dissipative properties; swabs; test methods; wipes; Clothing; Electrostatic discharge; Extraterrestrial measurements; Fingers; Hardware; Materials testing; Protection; Sheet materials; Surface contamination; Tiles;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2000

Conference_Location

Anaheim, CA, USA

Print_ISBN

1-58537-018-5

Type

conf

DOI

10.1109/EOSESD.2000.890040

Filename

890040