Title :
Evaluation of materials used in cleanrooms with ESD sensitive hardware
Author :
Lesniewski, Tom ; Yates, Kenn
Author_Institution :
Space & Electron. Group, TRW Inc., Redondo Beach, CA, USA
Abstract :
Measurements were done on nearly 90 products to determine their cleanliness and ESD protective properties. Categories of materials tested include floor tiles and mats, gloves, finger cots, bags and sheeting materials, garments, swabs and wipes. A variety of test methods was used to evaluate the materials. The results showed that few products had both nonvolatile residue less than 1 mg/ft/sup 2/ and static dissipative properties.
Keywords :
clean rooms; electrostatic discharge; integrated circuit manufacture; materials handling; materials testing; packaging; protection; surface contamination; ESD protective properties; ESD sensitive hardware; bags; cleanliness; cleanroom materials; cleanrooms; finger cots; floor mats; floor tiles; garments; gloves; nonvolatile residue; product measurements; sheeting materials; static dissipative properties; swabs; test methods; wipes; Clothing; Electrostatic discharge; Extraterrestrial measurements; Fingers; Hardware; Materials testing; Protection; Sheet materials; Surface contamination; Tiles;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2000
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
1-58537-018-5
DOI :
10.1109/EOSESD.2000.890040
