Title :
Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications
Author :
Matvejev, V. ; De Tandt, C. ; Ranson, W. ; Stiens, J.
Author_Institution :
Lab. of Micro- & Photoelectron., Vrije Univ. Brussel, Brussels, Belgium
Abstract :
Wet Si bulk micromachining enables producing hexagonally shaped waveguides (WH) with superior performance and are applicable to low THz frequency range. We discuss the fabrication process, hexagonal cross-section analysis, and balance between loss mitigation and operational frequency band of WH.
Keywords :
micromachining; microsensors; terahertz wave detectors; waveguides; Si; hexagonally shaped waveguide; loss mitigation; low loss integrated sensor applications; operational frequency band; wet silicon bulk micromachined waveguides; Attenuation; Electromagnetic waveguides; Etching; Micromachining; Rough surfaces; Silicon; Surface roughness;
Conference_Titel :
Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-6655-9
DOI :
10.1109/ICIMW.2010.5612337
