Title :
Multi-Bit Distributed MEMS Inductors
Author :
Balachandran, Shankar ; Lakshminarayanan, Balaji ; Weller, T.
Author_Institution :
Center for Wireless & Microwave Inf. Syst., South Florida Univ., Tampa, FL
Abstract :
This paper presents multi-bit MEMS inductors that operate from 5-40GHz. Tunability is achieved by the individual actuation of cantilever beams suspended on the center conductor and ground planes of coplanar waveguide. Inductance ratios of 1.2-3.0 were achieved over frequency with the inductance value ranging from 0.24nH to 0.73nH at 40GHz
Keywords :
cantilevers; coplanar waveguides; inductors; micromechanical devices; microwave devices; 5 to 40 GHz; cantilever beams; coplanar waveguide; distributed MEMS inductors; inductance ratios; multi-bit MEMS inductors; Capacitors; Conductors; Coplanar waveguides; Gold; Impedance; Inductance; Inductors; Micromechanical devices; Structural beams; Tunable circuits and devices;
Conference_Titel :
Microwave Symposium Digest, 2006. IEEE MTT-S International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-9541-7
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2006.249904
