Title :
Measurement technique developed to evaluate transient EMI in a photo bay with and without air ionization
Author :
Rudack, Andrew C. ; Pendley, Michael ; Levit, Larry
Author_Institution :
Int. SEMATECH, USA
Abstract :
A new technique for quantifying the magnitude and the rate of ESD-induced transient electromagnetic interference (ESD-EMI) was developed, and is presented along with results of measurements of the rate of such EMI with and without ionization in Photo Bay 2 at International SEMATECH. The rate of ESD-EMI events recorded in the bay was 30 times greater with the ionizers off than with them on. The technique used a very high sampling rate (4 GS/sec) digitizing oscilloscope, with a wide bandwidth (>1.5 GHz), and a histogram technique to acquire a spectrum of amplitudes of the transient events.
Keywords :
clean rooms; electric variables measurement; electromagnetic interference; electrostatic discharge; integrated circuit manufacture; integrated circuit measurement; ionisation; oscilloscopes; photolithography; 1.5 GHz; EMI measurements; ESD-EMI; ESD-EMI event rate; ESD-EMI magnitude; ESD-EMI rate; ESD-induced transient electromagnetic interference; International SEMATECH Photo Bay 2; air ionization; clean rooms; digitizing oscilloscope; histogram technique; ionization; measurement technique; oscilloscope bandwidth; photo bay; sampling rate; transient EMI; transient event amplitude spectrum; Electromagnetic interference; Electromagnetic transients; Electrostatic discharge; Frequency; Humidity; Inductance; Ionization; Measurement techniques; Microprocessors; Surface contamination;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2000
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
1-58537-018-5
DOI :
10.1109/EOSESD.2000.890106
