Title :
Microelectromechanical (MEM) switch and inverter for digital IC applications
Author :
Jang, Weon Wi ; Kwon, O. Deuk ; Lee, Jeong Oen ; Yoon, Jun-Bo
Author_Institution :
Korea Adv. Inst. of Sci. & Technol., Daejeon
Abstract :
Microelectromechanical (MEM) switch and MEM switch-based inverter was proposed and fabricated using a CMOS-compatible poly-Si surface micromachining process. The key concept is developed that the MEM switch-based inverter with the same implementation as CMOS inverter has a high noise immunity and low power dissipation because the MEM switch can clearly eliminate the leakage current when the device is off. The fabricated MEM switch showed ideal on/off characteristics with a sub-threshold swing of 4 m V/decade, an essentially zero off current, and a very high on/off current ratio over 10 s and also the MEM switch-based inverter showed ideal voltage transfer characteristics.
Keywords :
digital integrated circuits; logic devices; micromachining; microswitches; CMOS-compatible poly-Si surface micromachining; MEM switch-based inverter; MEMS; digital IC application; ideal voltage transfer characteristics; logic devices; microelectromechanical switch; Application specific integrated circuits; CMOS technology; Digital integrated circuits; Fabrication; Inverters; Leakage current; Logic devices; Semiconductor films; Switches; Switching circuits;
Conference_Titel :
Solid-State Circuits Conference, 2007. ASSCC '07. IEEE Asian
Conference_Location :
Jeju
Print_ISBN :
978-1-4244-1359-1
Electronic_ISBN :
978-1-4244-1360-7
DOI :
10.1109/ASSCC.2007.4425779
