• DocumentCode
    2709049
  • Title

    Design of low-loss distributed MEMS phase shifter

  • Author

    Ai-xin Chen ; Ying Li

  • Author_Institution
    EMC Lab., Beijing Univ. of Aeronaut. & Astronaut., Beijing, China
  • fYear
    2009
  • fDate
    27-29 Oct. 2009
  • Firstpage
    623
  • Lastpage
    626
  • Abstract
    An 90° and an 180° wide-band distributed MEMS transmission line phase shifters are designed respectively on a 500 ¿m sillion substrate for Ka-band in this documents. Both with the insert loss lower than -0.38 dB and -0.41 dB, and the return loss less than -10 dB. The final phase shift are 89.51° for 90° phase shifter and 176.09° for 180° phase shfter.
  • Keywords
    broadband networks; micromechanical devices; phase shifters; silicon; Ka-band; Si; insert loss; low-loss distributed MEMS; return loss; size 500 mum; transmission line phase shifters; wide-band distributed; Bridge circuits; Capacitance; Coplanar waveguides; Impedance; Micromechanical devices; Microswitches; Phase shifters; Power transmission lines; Radiofrequency microelectromechanical systems; Wideband; Distributed; MEMS; Phase Shifter;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave, Antenna, Propagation and EMC Technologies for Wireless Communications, 2009 3rd IEEE International Symposium on
  • Conference_Location
    Beijing
  • Print_ISBN
    978-1-4244-4076-4
  • Type

    conf

  • DOI
    10.1109/MAPE.2009.5355905
  • Filename
    5355905
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2709049