• DocumentCode
    2709308
  • Title

    Uncooled suspended bolometers based on La0.7Sr0.3Mn03 thin films

  • Author

    Guillet, B. ; Liu, S. ; Fur, C. ; Wu, S. ; Routoure, J.M. ; Adamo, C. ; Lemarie, F. ; Schlom, D. ; Méchin, L.

  • Author_Institution
    CNRS-ENSICAEN, Univ. de Caen Basse Normandie, Caen, France
  • fYear
    2010
  • fDate
    5-10 Sept. 2010
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    We report our results on uncooled La0.7Sr0.3MnO3 (LSMO) suspended bolometers fabricated using silicon micromachining techniques. Suspended LSMO bridges showed very low effective thermal conductance (~10-7 W K-1) and very low NEP value (~ 1 pW Hz-1/2) at 300K.
  • Keywords
    bolometers; lanthanum compounds; micromachining; noise; sputter etching; strontium compounds; thermal conductivity; LSMO thin films; La0.7Sr0.3MnO3; NEP value; effective thermal conductance; silicon micromachining techniques; suspended LSMO bridges; temperature 300 K; uncooled LSMO suspended bolometers; Bolometers; Bridges; Semiconductor device measurement; Silicon; Temperature measurement; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
  • Conference_Location
    Rome
  • Print_ISBN
    978-1-4244-6655-9
  • Type

    conf

  • DOI
    10.1109/ICIMW.2010.5612391
  • Filename
    5612391
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2709308