DocumentCode :
2709308
Title :
Uncooled suspended bolometers based on La0.7Sr0.3Mn03 thin films
Author :
Guillet, B. ; Liu, S. ; Fur, C. ; Wu, S. ; Routoure, J.M. ; Adamo, C. ; Lemarie, F. ; Schlom, D. ; Méchin, L.
Author_Institution :
CNRS-ENSICAEN, Univ. de Caen Basse Normandie, Caen, France
fYear :
2010
fDate :
5-10 Sept. 2010
Firstpage :
1
Lastpage :
1
Abstract :
We report our results on uncooled La0.7Sr0.3MnO3 (LSMO) suspended bolometers fabricated using silicon micromachining techniques. Suspended LSMO bridges showed very low effective thermal conductance (~10-7 W K-1) and very low NEP value (~ 1 pW Hz-1/2) at 300K.
Keywords :
bolometers; lanthanum compounds; micromachining; noise; sputter etching; strontium compounds; thermal conductivity; LSMO thin films; La0.7Sr0.3MnO3; NEP value; effective thermal conductance; silicon micromachining techniques; suspended LSMO bridges; temperature 300 K; uncooled LSMO suspended bolometers; Bolometers; Bridges; Semiconductor device measurement; Silicon; Temperature measurement; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-6655-9
Type :
conf
DOI :
10.1109/ICIMW.2010.5612391
Filename :
5612391
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2709308
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