Title :
Diagnosis of atmospheric pressure plasmas by using terahertz time-domain spectroscopy
Author :
Kitahara, Hideaki ; Ando, Ayumi ; Kitano, Katsuhisa ; Tani, Masahiko ; Hangyo, Masanori ; Hamaguchi, Satoshi
Author_Institution :
Center for Atomic & Mol. Technol., Osaka Univ., Suita, Japan
Abstract :
A parallel-plate atmospheric plasma generator has been built with discharge electrodes that also serve as a non-dispersive terahertz (THz) waveguide for plasma diagnostics based on THz time-domain spectroscopy. It has been confirmed that, in the system, a uniform glow-like atmospheric pressure plasma is generated and THz waves propagate as designed.
Keywords :
glow discharges; plasma diagnostics; plasma filled waveguides; plasma production; terahertz waves; atmospheric pressure plasma diagnosis; discharge electrode; glow-like atmospheric pressure plasma; nondispersive terahertz waveguide; parallel-plate atmospheric plasma generator; pressure 1 atm; terahertz time-domain spectroscopy; terahertz wave propagation; Atmospheric measurements; Atmospheric waves; Electrodes; Generators; Plasma measurements; Plasmas; Silicon;
Conference_Titel :
Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-6655-9
DOI :
10.1109/ICIMW.2010.5612410
