Title : 
Reviews and prospects of high-density RAM technology
         
        
            Author : 
Itoh, Kiyoo ; Watanabe, Takao ; Kimura, Shin Ichiro ; Sakata, Takeshi
         
        
            Author_Institution : 
Central Res. Lab., Hitachi Ltd., Kokubunji, Japan
         
        
        
        
        
        
            Abstract : 
We review memory-chip and memory-cell developments of various VLSI memories over the last three decades, trends in DRAM technology (such as power-supply schemes and gate oxide thickness compared with those of MPUs, memory-cell structures and multi-divided arrays for modern DRAMs), state-of-the art embedded DRAM technology for high-speed, low-cost and low-voltage designs, and prospects for emerging RAMs such as FeRAMs and MRAMs
         
        
            Keywords : 
VLSI; integrated circuit technology; random-access storage; FeRAM; MRAM; VLSI memory; embedded DRAM technology; gate oxide thickness; high-density RAM technology; high-speed design; low-cost design; low-voltage design; memory cell; memory chip; multi-divided array; power supply voltage; Costs; Ferroelectric films; Nonvolatile memory; Power supplies; Random access memory; Read-write memory; Research and development; Standards development; Very large scale integration; Voltage;
         
        
        
        
            Conference_Titel : 
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
         
        
            Conference_Location : 
Sinaia
         
        
            Print_ISBN : 
0-7803-5885-6
         
        
        
            DOI : 
10.1109/SMICND.2000.890184