Title :
Quartz temperature and pressure sensors
Author :
Poplavko, Y.M. ; Pereverzeva, L.P.
Author_Institution :
Nat. Tech. Univ., Kiev, Ukraine
Abstract :
Pyroelectric effect as well as volumetric piezoeffect are vectorial responses on scalar influences that usually are possible only in the crystals which symmetry belongs to pyroelectrics. Being good material for microelectronics, stress-free quartz is not pyroelectric. We use partial clamping conditions to convert this crystal into “artificial pyroelectric” by decrease its response symmetry
Keywords :
piezoelectric transducers; pressure sensors; pyroelectric detectors; quartz; temperature measurement; temperature sensors; SiO2; artificial pyroelectric; crystal symmetry; pressure sensor; pyroelectric effect; quartz; temperature sensor; volumetric piezoeffect; Clamps; Crystalline materials; Crystals; Dielectrics; Ferroelectric materials; Microelectronics; Piezoelectric polarization; Pyroelectricity; Semiconductor materials; Temperature sensors;
Conference_Titel :
Applications of Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on
Conference_Location :
East Brunswick, NJ
Print_ISBN :
0-7803-3355-1
DOI :
10.1109/ISAF.1996.598093
