Title :
Low-Loss Single and Differential Semi-Coaxial Interconnects in Standard CMOS Process
Author :
Jin, Jun-De ; Hsu, Shawn S H ; Yang, Ming-Ta ; Liu, Sally
Author_Institution :
Dept. of Electr. Eng. & Inst. of Electron. Eng., Nat. Tsing Hua Univ., Hsinchu
Abstract :
The low-loss single semi-coaxial (S-SC) and differential semi-coaxial (D-SC) interconnects based on a standard 0.18-mum CMOS process are presented for the first time. Compared to the attenuation constant (alpha) reported for microstrip and CPW interconnects in CMOS process, the S-SC line shows the lowest loss of 0.90 dB/mm at 50 GHz. The D-SC line also presents a very low differential-mode alpha of ~1.00 dB/mm at high frequencies. The characteristics of D-SC lines for differential-mode and common-mode are also investigated in details based on the measured mixed-mode S-parameters
Keywords :
CMOS integrated circuits; S-parameters; coplanar waveguides; integrated circuit interconnections; microstrip lines; 0.18 micron; 50 GHz; CMOS process; CPW interconnects; D-SC interconnects; S-SC interconnects; attenuation constant; coplanar waveguides; differential semi-coaxial interconnects; low-loss single semi-coaxial interconnects; microstrip interconnects; mixed-mode S-parameters; CMOS process; CMOS technology; Coplanar waveguides; Crosstalk; Geometry; Integrated circuit interconnections; Manufacturing processes; Microstrip; Radio frequency; Semiconductor device manufacture; CMOS; CPW; differential line; microstrip; semi-coaxial interconnects;
Conference_Titel :
Microwave Symposium Digest, 2006. IEEE MTT-S International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-9541-7
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2006.249580
