Title :
Development of single-material multi-layer interference filter with sub-wavelength structure for cryogenic infrared astronomical missions
Author :
Wada, T. ; Makitsubo, H. ; Mita, M.
Author_Institution :
Inst. of Space & Astronaut. Sci., Japan Aerosp. Exploration Agency, Sagamihara, Japan
Abstract :
We are developing single-material (all-silicon) interference filter for cryogenic infrared astronomy. Layers with different refractive indices and multi-layer structure are realized by sub-wavelength structure fabricated by photo lithography and wafer bonding technique, respectively.
Keywords :
microfabrication; optical multilayers; photolithography; refractive index; wafer bonding; cryogenic infrared astronomical missions; multilayer structure; photolithography; refractive indices; single-material multi-layer interference filter; sub-wavelength structure; wafer bonding technique; Band pass filters; Filtering theory; Interference; Optical filters; Refractive index; Silicon;
Conference_Titel :
Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-6655-9
DOI :
10.1109/ICIMW.2010.5612458
