DocumentCode
2710520
Title
Key Considerations for Selection of Diffusion Furnaces
Author
Olsen, Tony
Author_Institution
Univ. of Utah, Salt Lake City, UT, USA
fYear
2012
fDate
9-10 July 2012
Firstpage
1
Lastpage
1
Abstract
Diffusion furnaces are an integral part of nano and micro-fabrication. Research micro-fabrication labs often face the challenge of selecting furnaces that can minimize cost and space requirements, while maximizing process flexibility. This presentation will discuss several LPCVD and atmospheric furnace options that labs may find useful when selecting furnaces for their facility.
Keywords
chemical vapour deposition; furnaces; microfabrication; nanofabrication; LPCVD; atmospheric furnace; diffusion furnaces; microfabrication; nanofabrication; Boats; Educational institutions; Face; Furnaces; Power demand; Substrates; Tracking;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry, Micro/Nano Symposium (UGIM), 2012 19th Biennial
Conference_Location
Berkeley, CA
ISSN
0749-6877
Print_ISBN
978-1-4577-1751-2
Electronic_ISBN
0749-6877
Type
conf
DOI
10.1109/UGIM.2012.6247107
Filename
6247107
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