• DocumentCode
    2710531
  • Title

    Free carrier lifetime reduction in silicon by electron-beam irradiation

  • Author

    Codreanu, Cecilia ; Vasile, E. ; Iliescu, Elena ; Avram, Marioara ; Badoiu, A. ; Ravariu, C.

  • Author_Institution
    Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania
  • Volume
    1
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    255
  • Abstract
    Point defects induced by electron-beam irradiation introduce new recombination centers in the band-gap determining the free carrier lifetime reduction. This effect is successfully used in reduction the switching time of semiconductor devices. Our work presents a model for the free carrier lifetime in silicon that takes into account the influence of concentration and energy level of the recombination centers induced by electron-beam irradiation. The irradiation was made on silicon diodes in a 7 MeV accelerator, in different does and temperature conditions. The simulation procedure consists in modeling the primary defect generation and rescaling the primary defect profile as a function of irradiation temperature. Then carrier lifetime is deduced by using the Shockley-Read-Hall statistics and an experimental database
  • Keywords
    carrier lifetime; electron beam effects; electron-hole recombination; elemental semiconductors; point defects; power semiconductor diodes; silicon; 7 MeV; Shockley-Read-Hall statistics; Si; electron beam irradiation; free carrier lifetime; gap state; point defect; recombination center; semiconductor device; silicon power diode; switching time; Charge carrier lifetime; Energy states; Photonic band gap; Radiative recombination; Semiconductor devices; Semiconductor diodes; Silicon; Spontaneous emission; Statistics; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2000. CAS 2000 Proceedings. International
  • Conference_Location
    Sinaia
  • Print_ISBN
    0-7803-5885-6
  • Type

    conf

  • DOI
    10.1109/SMICND.2000.890230
  • Filename
    890230